Influence of ultra-sonic frequency during substrate cleaning on the laser resistance of antireflection coatings

Thomas Gischkat; Daniel Schachtler; Zoltan Balogh-Michels; Roelene Botha; André Mocker; Bernd Eiermann; Sven Günther

doi:10.1117/12.2536442

20 November 2019 Influence of ultra-sonic frequency during substrate cleaning on the laser resistance of antireflection coatings

Thomas Gischkat, Daniel Schachtler, Zoltan Balogh-Michels, Roelene Botha, André Mocker, Bernd Eiermann, Sven Günther

Author Affiliations +

Proceedings Volume 11173, Laser-induced Damage in Optical Materials 2019; 1117317 (2019) https://doi.org/10.1117/12.2536442
Event: SPIE Laser Damage, 2019, Broomfield (Boulder area), Colorado, United States

Abstract

Cleaning of substrates prior to optical coating is an important step in the manufacturing of high performance optical components. It is well known that the ultra-sonic frequency used during substrate cleaning has a strong influence on the quality of the cleaning process and the number of remaining particles on the surface. Therefore, we have investigated the influence of ultra-sonic frequency during substrate cleaning on the laser resistance of antireflection coatings. For this purpose, a SiO₂ / Ta₂O₅ AR-coating for a normal angle of incidence at 1064 nm was deposited onto fused silica substrates. Prior to deposition, the substrates were cleaned with cleaning processes. The applied ultra-sonic frequencies were 40, 80, 120 and 500 kHz. After deposition the LIDT was measured using a 1064 nm ns-pulsed laser test bench. It turned out that the different ultra-sonic-cleaning processes have a strong influence on the number of remaining particles on the surface of the cleaned samples. The counted number of particles with sizes greater < 83 nm were between 1320 and 12 particles for the different applied ultra-sonic frequencies. In consequence the different cleaned and AR-coated samples show different laser damage behavior. Nevertheless the measured particle density does not totally explain the differences in laser resistance.

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Thomas Gischkat, Daniel Schachtler, Zoltan Balogh-Michels, Roelene Botha, André Mocker, Bernd Eiermann, and Sven Günther "Influence of ultra-sonic frequency during substrate cleaning on the laser resistance of antireflection coatings", Proc. SPIE 11173, Laser-induced Damage in Optical Materials 2019, 1117317 (20 November 2019); https://doi.org/10.1117/12.2536442

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