Surface Flatness Measurement System

S. Wakana; M. Inada; Y. Goto; M. Nakashima

doi:10.1117/12.955591

11 October 1989 Surface Flatness Measurement System

S. Wakana, M. Inada, Y. Goto, M. Nakashima

Proceedings Volume 1113, Reflective Optics II; (1989) https://doi.org/10.1117/12.955591
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

We have developed a laser surface flatness measurement system, based on a new measurement principle. It measures angular displacements at a fixed interval, then caliculates the surface profile by totaling the angular data multiplies with the measurement pitch. With calibration, our system's measurement accuracy is better than 0.01 μm at about 1 mm/s.

Citation Download Citation

S. Wakana, M. Inada, Y. Goto, and M. Nakashima "Surface Flatness Measurement System", Proc. SPIE 1113, Reflective Optics II, (11 October 1989); https://doi.org/10.1117/12.955591

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