Extending wavefront sensing range of phase diversity

Zhaojun Yan; Pengqian Yang

doi:10.1117/12.2525980

21 June 2019 Extending wavefront sensing range of phase diversity

Zhaojun Yan, Pengqian Yang

Proceedings Volume 11057, Modeling Aspects in Optical Metrology VII; 110570W (2019) https://doi.org/10.1117/12.2525980
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Phase diversity is a powerful methodology technique for measuring the wavefront aberrations of optical systems and surfaces by solving an unconstrained optimization problem from multiple images whose pupil phases differ from one another by a known amount. However, it often fails for large wavefront aberrations. A modified phase diversity technique to improve the sensing dynamic range was proposed. We conducted computer simulations of the reconstruction of large aberrations of an optical system with the proposed phase diversity method. We fitted the wavefront to Zernike polynomials to reduce the number of variables. The limited-memory Broyden-Fletcher-Goldfarb-Shanno (L-BFGS) algorithm was used for optimizing process. The study shows that the method can extend the dynamic range from about 2λ to about 11λ and the paper gives practical guidelines for the application of phase diversity methods to characterize large wavefront aberrations.

Citation Download Citation

Zhaojun Yan and Pengqian Yang "Extending wavefront sensing range of phase diversity", Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 110570W (21 June 2019); https://doi.org/10.1117/12.2525980

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