Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm

Han Zhou; Bingkun Wu; Mingguang Shan; Lei Liu; Haichao Yu; Zhi Zhong; Bin Liu

doi:10.1117/12.2511691

7 March 2019 Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm

Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Zhi Zhong, Bin Liu

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110531W (2019) https://doi.org/10.1117/12.2511691
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz^1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.

Citation Download Citation

Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Zhi Zhong, and Bin Liu "Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531W (7 March 2019); https://doi.org/10.1117/12.2511691

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