Selective spin-on deposition of polymers on heterogeneous surfaces

Yuanyi Zhang; Colton D'Ambra; Reika Katsumata; Rachel A. Segalman; Craig J. Hawker; Christopher M. Bates

doi:10.1117/12.2515666

25 March 2019 Selective spin-on deposition of polymers on heterogeneous surfaces

Yuanyi Zhang, Colton D'Ambra, Reika Katsumata, Rachel A. Segalman, Craig J. Hawker, Christopher M. Bates

Proceedings Volume 10960, Advances in Patterning Materials and Processes XXXVI; 109600Q (2019) https://doi.org/10.1117/12.2515666
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Selective deposition holds promise to simplify next-generation device fabrication and bring down economic cost. In this work, selectively depositing polymers on metal/dielectric patterns was achieved by spin dewetting, a phenomenon that refers to the dewetting of polymers during spin coating. Our strategy utilizes self-assembled monolayers (SAMs) to induce dewetting of polymers over some areas. Line patterns of Cu/SiO₂ were investigated. A hydrophobic SAM, octyltrichlorosilane (OTS, Cl₃Si–C₈H₁₇), was selectively formed on SiO₂ in the presence of Cu to render SiO₂ non-wettable. During a subsequent spin coating step, polymers dewet from OTS-functionalized SiO₂ and coat Cu exclusively. The spin dewetting process is strongly dictated by the spin coating kinetics. A systematic study of the processing conditions revealed strong dependence of polymer film coverage on spin speed, solution concentration, polymer molecular weight, casting solvent, and SAM hydrophobicity.

Conference Presentation

Citation Download Citation

Yuanyi Zhang, Colton D'Ambra, Reika Katsumata, Rachel A. Segalman, Craig J. Hawker, and Christopher M. Bates "Selective spin-on deposition of polymers on heterogeneous surfaces", Proc. SPIE 10960, Advances in Patterning Materials and Processes XXXVI, 109600Q (25 March 2019); https://doi.org/10.1117/12.2515666

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available