Measurement system of film structure by interferometry and ellipsometry

K.-N. Joo; Y. H. Yun

doi:10.1117/12.2516148

26 March 2019 Measurement system of film structure by interferometry and ellipsometry

K.-N. Joo, Y. H. Yun

Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 1095927 (2019) https://doi.org/10.1117/12.2516148
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

We propose a novel combined measurement system for measuring surface and thickness profiles of multi-layered film specimens named as MYFIELM (Measurement sYstem of Film structure by Interferometry and ELlipsoMetry). Film thickness profiles measured by ellipsometry mode are transferred to interferometry mode in MYFIELM and the surface profile can be extracted from the spectral phase of the interferometry containing both of surface height and film thicknesses. For the verification, each performance of the operating mode was confirmed and 4 film layered specimen was measured in comparison of the reference values. To the best of our knowledge, MYFIELM is the most suitable solution for characterizing thin film structures with a textured substrate without any damage on the specimen compared with the previous techniques even though it needs further improvements for stability and reliability.

Citation Download Citation

K.-N. Joo and Y. H. Yun "Measurement system of film structure by interferometry and ellipsometry", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 1095927 (26 March 2019); https://doi.org/10.1117/12.2516148

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available