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Tunable diode lasers are an important tool for spectroscopy and as laser sources for a wide range of applications. In this paper, an improvement of External Cavity Diode Lasers (ECDLs) is presented. The present generation of ECDLs is designed as a laboratory instrument which is sensitive against ambient disturbance like shock, noise, and temperature fluctuations. In addition, state of the art ECDLs in Littrow and Littman/Metcalf configuration have limitations in terms of tuning range, tuning speed, and size. These technologically disadvantages make it difficult to use ECDLs for various applications. Therefore, we developed a new miniaturized mode-hop free tunable next-generation ECDL design based on a Micro Electro Mechanical System (MEMS) device. It includes the benefits of the current ECDL technology and allows an outstanding improvement in terms of efficiency, stability, repeatability and tuning range. Moreover, the tuning speed is increased into the kHz regime due to the fast nature of the tilting capabilities of the MEMS actuators. The focus will be set on the initial use of this new design in connection with semiconductor laser chips based on GaAs, InP, GaSb and IC. This makes it possible to cover a large area from the near-infrared up to the mid-infrared. Especially the midinfrared contains stronger absorption lines of significant gases, which are of great interest in the field of biomedicine, process control and environmental monitoring. The excellent performance of this innovative ECDL cavity design as well as the low noise promises better possibilities of gas detection for the previously mentioned applications.
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