Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy

Zhongye Xie; Yan Tang; Xi Liu; Kejun Yang; Song Hu

doi:10.1117/12.2505137

30 January 2019 Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy

Zhongye Xie, Yan Tang, Xi Liu, Kejun Yang, Song Hu

Author Affiliations +

Proceedings Volume 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics; 1084105 (2019) https://doi.org/10.1117/12.2505137
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Effective measurement of the surface and thickness variation of thin films are important to achieve a special function and better performance for a coated optical device. In this research, we propose a new incoherent technique named Fourier transform-based structured illumination microscopy (FTSIM) to detect the surface topography and thickness distribution. In this technique, a sinusoidal fringe pattern produced by digital micro-mirror devices (DMD) is projected onto the sample. The modulation estimation which depends on the surface and thickness of thin films is obtained by two-dimensional Fourier transform algorithm. Further, separating the reflected signals from the film boundaries, the surface finish of the film, as well as a film thickness map, can be achieved at the same time. With this method, only one pattern is required to determine the modulation value of a whole field. The measurement system is relatively simple and only an ordinary objective is enough to achieve imaging of the sample. Both theory and experiments are conducted in detail to demonstrate that the availability of this method.

Citation Download Citation

Zhongye Xie, Yan Tang, Xi Liu, Kejun Yang, and Song Hu "Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy", Proc. SPIE 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics, 1084105 (30 January 2019); https://doi.org/10.1117/12.2505137

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available