Research on stitching metrology of large aperture continuous spiral phase plate

Hao Yan

doi:10.1117/12.2504820

11 January 2019 Research on stitching metrology of large aperture continuous spiral phase plate

Hao Yan

Author Affiliations +

Proceedings Volume 10837, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes; 1083716 (2019) https://doi.org/10.1117/12.2504820
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

The fully continuous spiral phase plate (SPP) can produce high quality vortex beams, which has important application value in the field of high-power lasers. For the stitching test of large aperture SPP with large gradient characteristics, the error factors that affect the accuracy of stitching are analyzed, and the corresponding error correction methods are proposed. On the basis, the stitching test of 235 mm×175 mm aperture SPP is achieved. Multiple test results indicate that the RMS repeatability of stitching is up to 0.0016 λ and the RMS accuracy can reach 4.52 nm.

Citation Download Citation

Hao Yan "Research on stitching metrology of large aperture continuous spiral phase plate", Proc. SPIE 10837, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 1083716 (11 January 2019); https://doi.org/10.1117/12.2504820

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