Advanced CD-SEM imaging methodology for EPE measurements

Yoshikata Takemasa; Takeyoshi Ohashi; Hiroyuki Shindo; Gian Lorusso; Anne-Laure Charley

doi:10.1117/12.2298393

28 March 2018 Advanced CD-SEM imaging methodology for EPE measurements

Yoshikata Takemasa, Takeyoshi Ohashi, Hiroyuki Shindo, Gian Lorusso, Anne-Laure Charley

Author Affiliations +

Proceedings Volume 10585, Metrology, Inspection, and Process Control for Microlithography XXXII; 1058522 (2018) https://doi.org/10.1117/12.2298393
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Accurate EPE (edge placement error) characterization is important for the process control of high-volume manufacturing at N5 BEOL and beyond. In a CD-SEM metrology, the accurate edge-to-edge measurements among multiple layers and/or SEM-Contour extraction are required for the accurate EPE characterization. One of the technical challenges in CD-SEM metrology is to control charging effects caused by EB-irradiation during SEM image acquisition. In this paper, the effects of new charge control methods (Special Scan and Faster Scan), which are implemented in the latest Hitachi CD-SEM (CG6300), were examined with EUV resist hole-patterns. It was confirmed that Special Scan showed a profound effect on the suppression of the charge-induced errors. We also demonstrated the effects of the Special Scan for CD measurements and Contour Extraction for the EPE characterization of block on SAQP (SAQP lines + EUV block) pattern at imec iN7platform. Consequently, Special Scan is expected to be the solution for the accurate EPE measurements by CD-SEM.

Citation Download Citation

Yoshikata Takemasa, Takeyoshi Ohashi, Hiroyuki Shindo, Gian Lorusso, and Anne-Laure Charley "Advanced CD-SEM imaging methodology for EPE measurements", Proc. SPIE 10585, Metrology, Inspection, and Process Control for Microlithography XXXII, 1058522 (28 March 2018); https://doi.org/10.1117/12.2298393

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE