Short-coherence in-line phase-shifting infrared digital holographic microscopy for measurement of internal structure in silicon

Teli Xi; Jiazhen Dou; Jianglei Di; Ying Li; Jiwei Zhang; Chaojie Ma; Jianlin Zhao

doi:10.1117/12.2270654

13 June 2017 Short-coherence in-line phase-shifting infrared digital holographic microscopy for measurement of internal structure in silicon

Teli Xi, Jiazhen Dou, Jianglei Di, Ying Li, Jiwei Zhang, Chaojie Ma, Jianlin Zhao

Author Affiliations +

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104491F (2017) https://doi.org/10.1117/12.2270654
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

Short-coherence in-line phase-shifting digital holographic microscopy based on Michelson interferometer is proposed to measure internal structure in silicon. In the configuration, a short-coherence infrared laser is used as the light source in order to avoid the interference formed by the reference wave and the reflected wave from the front surface of specimen. At the same time, in-line phase-shifting configuration is introduced to overcome the problem of poor resolution and large pixel size of the infrared camera and improve the space bandwidth product of the system. A specimen with staircase structure is measured by using the proposed configuration and the 3D shape distribution are given to verify the effectiveness and accuracy of the method.

Citation Download Citation

Teli Xi, Jiazhen Dou, Jianglei Di, Ying Li, Jiwei Zhang, Chaojie Ma, and Jianlin Zhao "Short-coherence in-line phase-shifting infrared digital holographic microscopy for measurement of internal structure in silicon", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104491F (13 June 2017); https://doi.org/10.1117/12.2270654

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