Enhanced resolution and accuracy of freeform metrology through Subaperture Stitching Interferometry

Chris Supranowitz; Chris Maloney; Paul Murphy; Paul Dumas

doi:10.1117/12.2279821

16 October 2017 Enhanced resolution and accuracy of freeform metrology through Subaperture Stitching Interferometry

Chris Supranowitz, Chris Maloney, Paul Murphy, Paul Dumas

Author Affiliations +

Proceedings Volume 10448, Optifab 2017; 1044818 (2017) https://doi.org/10.1117/12.2279821
Event: SPIE Optifab, 2017, Rochester, New York, United States

Abstract

Recent advances in polishing and metrology have addressed many of the challenges in the fabrication and metrology of freeform surfaces, and the manufacture of these surfaces is possible today. However, achieving the form and mid-spatial frequency (MSF) specifications that are typical of visible imaging systems remains a challenge. Interferometric metrology for freeform surfaces is thus highly desirable for such applications, but the capability is currently quite limited for freeforms. In this paper, we provide preliminary results that demonstrate accurate, high-resolution measurements of freeform surfaces using prototype software on QED’s ASI™ (Aspheric Stitching Interferometer).

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Chris Supranowitz, Chris Maloney, Paul Murphy, and Paul Dumas "Enhanced resolution and accuracy of freeform metrology through Subaperture Stitching Interferometry", Proc. SPIE 10448, Optifab 2017, 1044818 (16 October 2017); https://doi.org/10.1117/12.2279821

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