Paper
23 August 2017 Alignment of KB mirrors with at-wavelength metrology tool simulated using SRW
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Abstract
Synchrotron Radiation Workshop (SRW) is a powerful synchrotron radiation simulation tool and has been widely used at synchrotron facilities all over the world. During the last decade, many types of X-ray wavefront sensors have been developed and used. In this work, we present our recent effort on the development of at-wavelength metrology simulation based on SRW mainly focused on the Hartmann Wavefront Sensor (HWS). Various conditions have been studied to verify that the simulated HWS is performing as expected in terms of accuracy. This at-wavelength metrology simulation tool is then used to align KB mirrors by minimizing the wavefront aberrations. We will present our optimization process to perform an ‘in situ’ alignment using conditions as close as possible to the real experiments (KB mirrors with different levels of figure errors or different misalignment geometry).
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mourad Idir, Maksim Rakitin, Bo Gao, Junpeng Xue, Lei Huang, and Oleg Chubar "Alignment of KB mirrors with at-wavelength metrology tool simulated using SRW", Proc. SPIE 10388, Advances in Computational Methods for X-Ray Optics IV, 103880Z (23 August 2017); https://doi.org/10.1117/12.2274264
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Cited by 2 scholarly publications.
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KEYWORDS
Metrology

Mirrors

Device simulation

Optical alignment

Wavefront sensors

Synchrotrons

X-rays

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