Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry

Yi Zhou; Yan Tang; Qinyuan Deng; Lixin Zhao; Song Hu

doi:10.1117/12.2280001

23 August 2017 Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry

Yi Zhou, Yan Tang, Qinyuan Deng, Lixin Zhao, Song Hu

Author Affiliations +

Proceedings Volume 10373, Applied Optical Metrology II; 103730G (2017) https://doi.org/10.1117/12.2280001
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Three-dimensional measurement and inspection is an area with growing needs and interests in many domains, such as integrated circuits (IC), medical cure, and chemistry. Among the methods, broadband light interferometry is widely utilized due to its large measurement range, noncontact and high precision. In this paper, we propose a spatial modulation depth-based method to retrieve the surface topography through analyzing the characteristics of both frequency and spatial domains in the interferogram. Due to the characteristics of spatial modulation depth, the technique could effectively suppress the negative influences caused by light fluctuations and external disturbance. Both theory and experiments are elaborated to confirm that the proposed method can greatly improve the measurement stability and sensitivity with high precision. This technique can achieve a superior robustness with the potential to be applied in online topography measurement.

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Citation Download Citation

Yi Zhou, Yan Tang, Qinyuan Deng, Lixin Zhao, and Song Hu "Dimensional metrology of micro structure based on modulation depth in scanning broadband light interferometry", Proc. SPIE 10373, Applied Optical Metrology II, 103730G (23 August 2017); https://doi.org/10.1117/12.2280001

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