A flexible, simple telecentric three dimensional measurement system

Tong Chen; Jindong Tian; Yong Tian; Jianmei Wu; Dong Li

doi:10.1117/12.2270126

26 June 2017 A flexible, simple telecentric three dimensional measurement system

Tong Chen, Jindong Tian, Yong Tian, Jianmei Wu, Dong Li

Proceedings Volume 10330, Modeling Aspects in Optical Metrology VI; 103300H (2017) https://doi.org/10.1117/12.2270126
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Calibration which defines the relationship between the phase and depth data is the important part of the fringe projection profilometry. In practice, the inherently nonlinear and spatially variable relationship between the absolute phase of the projected fringe and the object surface depth without using telecentric lens make calibration problematic in the measurement of small object. In order to obtain this problem, a flexible, simple telecentric three dimensional measurement system is proposed. Because of the characteristic that the size of object will not change with depth in telecentric imaging, the absolute phase is linear with the depth and the process of calibration become simpler. The experiment result indicate that the standard deviation of calibration result at z coordinate is within 5 μm, while that at x and y coordinate is within 3 μm. Three-dimensional shape reconstruction of a coin value ¥1 and measurement of central circle points of the calibration target further verify the validity of the proposed calibration method.

Citation Download Citation

Tong Chen, Jindong Tian, Yong Tian, Jianmei Wu, and Dong Li "A flexible, simple telecentric three dimensional measurement system", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 103300H (26 June 2017); https://doi.org/10.1117/12.2270126

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