Paper
14 May 2007 Encompassing spatial frequency requirements in optical metrology
Richard N. Youngworth, Kathleen S. Youngworth
Author Affiliations +
Abstract
Traditionally, optical surface specifications have been given for figure and finish. Surface figure covered the low spatial frequencies and finish covered high spatial frequencies. Scratch/dig was used as a cosmetic specification for the quality of the surface. In the more recent past, advances in optical fabrication have enabled production of more complex surface shapes. This has led to a greater need to specify surfaces across a continual spatial frequency spectrum. In this paper we discuss metrology considerations and calculations necessary to produce surfaces to such requirements, including an example with measurements. The results are applicable to various surface specifications including amplitude spectral density, power spectral density, structure functions, or slope specification. The results also are applicable to a variety of optical metrology methods.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard N. Youngworth and Kathleen S. Youngworth "Encompassing spatial frequency requirements in optical metrology", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160K (14 May 2007); https://doi.org/10.1117/12.721152
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Spatial frequencies

Metrology

Optical metrology

Interferometers

Mirrors

Profilometers

Signal processing

Back to Top