Design And Construction Of A Phase-Locked Interference Microscope

Glen W. Johnson; Duncan T. Moore

doi:10.1117/12.955401

10 August 1977 Design And Construction Of A Phase-Locked Interference Microscope

Glen W. Johnson, Duncan T. Moore

Proceedings Volume 0103, Systems Integration and Optical Design: Another Look; (1977) https://doi.org/10.1117/12.955401
Event: 1977 SPIE/SPSE Technical Symposium East, 1977, Reston, United States

Abstract

An A.C. interference microscope based on a technique called phase-locked interferometry has been constructed. The instrument is capable of detecting phase differences approaching λ/100. It may be used for measuring surface features (roughness, curvature) or transparent phase objects such as gradient index materials, microballoons and biological samples.

Citation Download Citation

Glen W. Johnson and Duncan T. Moore "Design And Construction Of A Phase-Locked Interference Microscope", Proc. SPIE 0103, Systems Integration and Optical Design: Another Look, (10 August 1977); https://doi.org/10.1117/12.955401

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available