Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers

B. Konoplev; E. Ryndin; I. Lysenko; M. Denisenko; A. Isaeva

doi:10.1117/12.2266562

30 December 2016 Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers

B. Konoplev, E. Ryndin, I. Lysenko, M. Denisenko, A. Isaeva

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241E (2016) https://doi.org/10.1117/12.2266562
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

A method of signal processing devices design for micromechanical accelerometers with capacitive transducers is proposed. This method provides the complex solution of the sensibility increasing and noise immunity problems by finding of the difference frequency of signals, which are formed by two identical generators with micromechanical capacitive transducers in frequency control circuits. In this study the analog and digital versions of the highly sensitive signal processing devices circuits with frequency output were developed. The breadboards of these devices are fabricated and studied and the project of their integral realization is designed.

Citation Download Citation

B. Konoplev, E. Ryndin, I. Lysenko, M. Denisenko, and A. Isaeva "Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241E (30 December 2016); https://doi.org/10.1117/12.2266562

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