Ultra-Precision Airbearing Workspindles For The Economic Micro-Machining Of Optical Quality Components

P. A. McKeown; W. J. Wills-Moren; K. Carlisle; P. D. Chapman

doi:10.1117/12.949444

11 April 1989 Ultra-Precision Airbearing Workspindles For The Economic Micro-Machining Of Optical Quality Components

P. A. McKeown, W. J. Wills-Moren, K. Carlisle, P. D. Chapman

Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989) https://doi.org/10.1117/12.949444
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

World wide experience over the last few years has shown that for the efficient economic micro-machining of optical glasses to aspheric profiles, with zero to low sub-surface damage, a high loop stiffness between tool and workpiece is essential, and that the tool penetration must be controllable to better than 100 nm for many materials. This paper analyses the implications of this requirement for the stiffness and accuracy of workhead spindles. The design of a variety of ultra precision air bearing workhead spindles is outlined, and the efficient high speed metrological techniques for test and calibration of such spindles down to 1 nm resolution, is described.

Citation Download Citation

P. A. McKeown, W. J. Wills-Moren, K. Carlisle, and P. D. Chapman "Ultra-Precision Airbearing Workspindles For The Economic Micro-Machining Of Optical Quality Components", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); https://doi.org/10.1117/12.949444

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