Assessment Of Surface Topography By X-Ray Scattering Measurements

Bernd Aschenbach; Heinrich Brauninger

doi:10.1117/12.949171

21 March 1989 Assessment Of Surface Topography By X-Ray Scattering Measurements

Bernd Aschenbach, Heinrich Brauninger

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949171
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

In the context of developing optics for X-ray astronomy, measurements of a variety of flat mirrors and telescopes have revealed that the total integrated scatter (TIS) formalism, well known in the optical regime, also describes the surface scattering of soft X-rays. The topography of mirror surfaces can be well studied by angle resolved X-ray scattering, from which e.g. the power spectrum and auto-covariance function of surface irregularities can be inferred. X-rays can also be used as diagnostic tool to identify surface slope changes and periodic like structures. A quantitative formalism is derived to separate the spectrum of spatial surface wavelengths into components which can be treated in a geometrical optics appraoch and those which need exact diffraction treatment. This formalism has been applied to predict the X-ray point spread function of telescopes from mechanical profile measurements. The agreement between prediction and X-ray measurement is remarkably good.

Citation Download Citation

Bernd Aschenbach and Heinrich Brauninger "Assessment Of Surface Topography By X-Ray Scattering Measurements", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949171

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