Comparison Of Profiler Measurements Using Different Magnification Objectives

P Z Takacs; E L Church

doi:10.1117/12.939603

23 March 1987 Comparison Of Profiler Measurements Using Different Magnification Objectives

P Z Takacs, E L Church

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939603
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

A WYKO TOPO-2D optical profiler system with four different magnification objectives (2.5X, 10X, 20X and 40X) was used to measure the microroughness properties of a set of five different flat samples. Measurements are compared in terms of the average periodogram for each surface as a function of microscope objective, and the effects of correcting for the transfer function of each objective are assessed.

Citation Download Citation

P Z Takacs and E L Church "Comparison Of Profiler Measurements Using Different Magnification Objectives", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939603

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