High Accuracy Phase Measurement In Real Time

Johannes Schwider; Regina Burow; Karl-Edmund Elssner; Jurgen Grzanna; Reiner Spolaczyk

doi:10.1117/12.942412

18 January 1985 High Accuracy Phase Measurement In Real Time

Johannes Schwider, Regina Burow, Karl-Edmund Elssner, Jurgen Grzanna, Reiner Spolaczyk

Proceedings Volume 0473, Symposium Optika '84; (1985) https://doi.org/10.1117/12.942412
Event: Symposium Optika '84, 1984, Budapest, Hungary

Abstract

Real time interferometry using the intensities at discrete reference phase values equally distributed over one fringe period is described. Principle, experimental setup and test examples (plane and spherical surfaces, optical systems) are discussed. Further, some error causes are covered, compensation techniques described and experimentally proofed

Citation Download Citation

Johannes Schwider, Regina Burow, Karl-Edmund Elssner, Jurgen Grzanna, and Reiner Spolaczyk "High Accuracy Phase Measurement In Real Time", Proc. SPIE 0473, Symposium Optika '84, (18 January 1985); https://doi.org/10.1117/12.942412

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