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1 April 2022 Laser based metal/metal-oxide nanomaterial processing
Seung Hwan Ko, Junhyuk Bang
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Proceedings Volume PC11989, Laser-based Micro- and Nanoprocessing XVI; PC1198908 (2022) https://doi.org/10.1117/12.2607922
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
Controlling the electrical properties as desired is a key technology for high-performance functional electronics. Some transition metals have been found in multiple oxidation states in nature, showing distinctive characteristics with multiple bandgap state from the same material. Active electronics are usually composed of a semiconductor and metal electrodes which are connected by multiple vacuum deposition steps and photolithography patterning. However, the presence of interface of dissimilar material between a semiconductor and a metal electrode makes various problems in electrical contacts and mechanical failure. The ideal electronics should not have problematic interfaces of dissimilar materials. In this study, we developed a novel method to fabricate active electronic components in a monolithic seamless fashion where both metal and semiconductor can be prepared from the same monolith material without creating semiconductor-metal interface.
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Seung Hwan Ko and Junhyuk Bang "Laser based metal/metal-oxide nanomaterial processing", Proc. SPIE PC11989, Laser-based Micro- and Nanoprocessing XVI, PC1198908 (1 April 2022); https://doi.org/10.1117/12.2607922
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KEYWORDS
Metals
Electronics
Interfaces
Laser processing
Nanomaterials
Semiconductors
Optical lithography
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