Front Matter: Volume 9423
Proceedings Volume Alternative Lithographic Technologies VII, 942301 (2015) https://doi.org/10.1117/12.2192291
Keynote Session
Dan B. Millward, Gurpreet S. Lugani, Scott L. Light, Ardavan Niroomand, Phillip D. Hustad, Peter Trefonas, Dung Quach, Valeriy V. Ginzburg
Proceedings Volume Alternative Lithographic Technologies VII, 942304 (2015) https://doi.org/10.1117/12.2086693
DSA Process and Integration
Proceedings Volume Alternative Lithographic Technologies VII, 942305 (2015) https://doi.org/10.1117/12.2086090
Proceedings Volume Alternative Lithographic Technologies VII, 942306 (2015) https://doi.org/10.1117/12.2085850
Joy Cheng, Gregory S. Doerk, Charles T. Rettner, Gurpreet Singh, Melia Tjio, Hoa Truong, Noel Arellano, Srinivasan Balakrishnan, Markus Brink, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 942307 (2015) https://doi.org/10.1117/12.2086973
Alan G. Jacobs, Clemens Liedel, Christopher K. Ober, Michael O. Thompson
Proceedings Volume Alternative Lithographic Technologies VII, 942309 (2015) https://doi.org/10.1117/12.2086057
UV-NIL for IC Manufacturing
Hiroaki Takeishi, S.V. Sreenivasan
Proceedings Volume Alternative Lithographic Technologies VII, 94230C (2015) https://doi.org/10.1117/12.2087017
Proceedings Volume Alternative Lithographic Technologies VII, 94230D (2015) https://doi.org/10.1117/12.2175483
Scanning Probe Lithography
Marcus Kaestner, Cemal Aydogan, Hubert-Seweryn Lipowicz, Tzvetan Ivanov, Steve Lenk, Ahmad Ahmad, Tihomir Angelov, Alexander Reum, Valentyn Ishchuk, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94230E (2015) https://doi.org/10.1117/12.2085846
Proceedings Volume Alternative Lithographic Technologies VII, 94230F (2015) https://doi.org/10.1117/12.2086073
Novel Lithography and Applications
M. Scotuzzi, M. J. Kamerbeek, Andy Goodyear, M. Cooke, C. W. Hagen
Proceedings Volume Alternative Lithographic Technologies VII, 94230I (2015) https://doi.org/10.1117/12.2085763
J. Llobet, M. Sansa, X. Borrisé, F. Pérez-Murano, M. Gerbolés
Proceedings Volume Alternative Lithographic Technologies VII, 94230K (2015) https://doi.org/10.1117/12.2085818
Metrology and Inspection for Directed Self-Assembly: Joint Session with Conferences 9423 and 9424
Hari Pathangi, Boon Teik Chan, Hareen Bayana, Nadia Vandenbroeck, Dieter Van Den Heuvel, Lieve Van Look, Paulina Rincon-Delgadillo, Yi Cao, JiHoon Kim, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94230M (2015) https://doi.org/10.1117/12.2085889
DSA Materials and Processes I: Joint Session with Conferences 9425 and 9423
Dung Quach, Valeriy V. Ginzburg, Mingqi Li, Janet Wu, Shih-wei Chang, Peter Trefonas III, Phillip D. Hustad, Dan B. Millward, Gurpreet S. Lugani, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94230N (2015) https://doi.org/10.1117/12.2085807
Proceedings Volume Alternative Lithographic Technologies VII, 94230O (2015) https://doi.org/10.1117/12.2085986
DSA Materials and Processes II: Joint Session with Conferences 9425 and 9423
JiHoon Kim, Jian Yin, Yi Cao, YoungJun Her, Claire Petermann, Hengpeng Wu, Jianhui Shan, Tomohiko Tsutsumi, Guanyang Lin
Proceedings Volume Alternative Lithographic Technologies VII, 94230R (2015) https://doi.org/10.1117/12.2086160
Chi-Chun Liu, Fee Li Lie, Vinayak Rastogi, Elliott Franke, Nihar Mohanty, Richard Farrell, Hsinyu Tsai, Kafai Lai, Melih Ozlem, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94230S (2015) https://doi.org/10.1117/12.2086053
Nanoimprint Lithography: Non-IC Applications
Maksim Zalkovskij, Lasse H. Thamdrup, Kristian Smistrup, Thomas Andén, Alicia C. Johansson, Niels Jørgen Mikkelsen, Morten Hannibal Madsen, Jørgen Garnæs, Tommy Tungelund Kristiansen, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94230T (2015) https://doi.org/10.1117/12.2085766
H. Hauser, N. Tucher, K. Tokai, P. Schneider, Ch. Wellens, A. Volk, S. Barke, C. Müller, Thomas Glinsner, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94230U (2015) https://doi.org/10.1117/12.2085754
Proceedings Volume Alternative Lithographic Technologies VII, 94230W (2015) https://doi.org/10.1117/12.2186050
Multibeam Lithography
Proceedings Volume Alternative Lithographic Technologies VII, 942310 (2015) https://doi.org/10.1117/12.2085100
Pieter Brandt, Charu Sardana, Dale Ibbotson, Marco Wieland, Aurélien Fay
Proceedings Volume Alternative Lithographic Technologies VII, 942311 (2015) https://doi.org/10.1117/12.2085500
Pieter Brandt, Céline Tranquillin, Marco Wieland, Sébastien Bayle, Matthieu Milléquant, Guillaume Renault
Proceedings Volume Alternative Lithographic Technologies VII, 942312 (2015) https://doi.org/10.1117/12.2085292
N. Koshida, A. Kojima, N. Ikegami, R. Suda, M. Yagi, J. Shirakashi, T. Yoshida, Hiroshi Miyaguchi, Masanori Muroyama, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 942313 (2015) https://doi.org/10.1117/12.2085782
DSA Line and via Patterning
HsinYu Tsai, Hiroyuki Miyazoe, Joy Cheng, Markus Brink, Simon Dawes, David Klaus, James Bucchignano, Daniel Sanders, Eric Joseph, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 942314 (2015) https://doi.org/10.1117/12.2084845
Proceedings Volume Alternative Lithographic Technologies VII, 942315 (2015) https://doi.org/10.1117/12.2085885
Yuriko Seino, Yusuke Kasahara, Hironobu Sato, Katsutoshi Kobayashi, Hitoshi Kubota, Shinya Minegishi, Ken Miyagi, Hideki Kanai, Katsuyoshi Kodera, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 942316 (2015) https://doi.org/10.1117/12.2085697
R. Tiron, A. Gharbi, P. Pimenta Barros, S. Bouanani, C. Lapeyre, S. Bos, A. Fouquet, J. Hazart, X. Chevalier, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 942317 (2015) https://doi.org/10.1117/12.2085819
Kye Okabe, He Yi, Maryann Tung, Richard Tiberio, Joost Bekaert, Roel Gronheid, H.-S. Philip Wong
Proceedings Volume Alternative Lithographic Technologies VII, 942318 (2015) https://doi.org/10.1117/12.2087569
Electron-Beam Applications
Matt Malloy, Brad Thiel, Benjamin D. Bunday, Stefan Wurm, Maseeh Mukhtar, Kathy Quoi, Thomas Kemen, Dirk Zeidler, Anna Lena Eberle, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 942319 (2015) https://doi.org/10.1117/12.2175535
Joerg Butschke, Mathias Irmscher, Corinna Koepernik, Stephan Martens, Holger Sailer, Bernd Schnabel
Proceedings Volume Alternative Lithographic Technologies VII, 94231A (2015) https://doi.org/10.1117/12.2086610
Christoph Hohle, Kang-Hoon Choi, Manuela Gutsch, Norbert Hanisch, Robert Seidel, Katja Steidel, Xaver Thrun, Thomas Werner
Proceedings Volume Alternative Lithographic Technologies VII, 94231B (2015) https://doi.org/10.1117/12.2087612
Isabelle Servin, Ndeye Arame Thiam, Patricia Pimenta-Barros, Marie-Line Pourteau, Armel-Petit Mebiene, Julien Jussot, Jonathan Pradelles, Philippe Essomba, Ludovic Lattard, et al.
Proceedings Volume Alternative Lithographic Technologies VII, 94231C (2015) https://doi.org/10.1117/12.2085915
Jan-Wen You, Cheng-Hung Chen, Tsung-Chih Chien, Jaw-Jung Shin, Shy-Jay Lin, Burn J. Lin
Proceedings Volume Alternative Lithographic Technologies VII, 94231D (2015) https://doi.org/10.1117/12.2085099
DSA Design for Manufacturability: Joint Session with Conferences 9423, 9426, and 9427
Seongbo Shim, Sibo Cai, Jaewon Yang, Seunghune Yang, Byungil Choi, Youngsoo Shin
Proceedings Volume Alternative Lithographic Technologies VII, 94231E (2015) https://doi.org/10.1117/12.2085644
Proceedings Volume Alternative Lithographic Technologies VII, 94231F (2015) https://doi.org/10.1117/12.2085866
Azat Latypov, Tamer H. Coskun
Proceedings Volume Alternative Lithographic Technologies VII, 94231G (2015) https://doi.org/10.1117/12.2085954
DSA Modeling
Jimmy Liu, Nabil Laachi, Kris T. Delaney, Glenn H. Fredrickson
Proceedings Volume Alternative Lithographic Technologies VII, 94231I (2015) https://doi.org/10.1117/12.2085666
Benjamin D. Nation, Andrew Peters, Richard A. Lawson, Peter J. Ludovice, Clifford L. Henderson
Proceedings Volume Alternative Lithographic Technologies VII, 94231J (2015) https://doi.org/10.1117/12.2085526
Grant Garner, Lance Williamson, Robert Seidel, Paulina Rincon Delgadillo, Su-Mi Hur, Roel Gronheid, Paul F. Nealey, Juan J. de Pablo
Proceedings Volume Alternative Lithographic Technologies VII, 94231K (2015) https://doi.org/10.1117/12.2085987
Richard A Lawson, Andrew J. Peters, Benjamin D. Nation, Peter J. Ludovice, Clifford L. Henderson
Proceedings Volume Alternative Lithographic Technologies VII, 94231L (2015) https://doi.org/10.1117/12.2086047
Poster Session: Nanoimprint Lithography
S. L. Shy, Anil Kumar T.V., Gene Sheu, Shao-Ming Yang, M. C. Chen, C. S. Hong
Proceedings Volume Alternative Lithographic Technologies VII, 94231M (2015) https://doi.org/10.1117/12.2075381
Jae Hong Park, Hyun Ik Jang, Jun Yong Park, Seok Woo Jeon, Woo Choong Kim, Hee Yeoun Kim, Chi Won Ahn
Proceedings Volume Alternative Lithographic Technologies VII, 94231N (2015) https://doi.org/10.1117/12.2080980
Poster Session: Electron-Beam Lithography and Applications
Proceedings Volume Alternative Lithographic Technologies VII, 94231P (2015) https://doi.org/10.1117/12.2085278
Proceedings Volume Alternative Lithographic Technologies VII, 94231Q (2015) https://doi.org/10.1117/12.2085832
Poster Session: Novel Lithography and Applications
Lan Lin, Xuexue Guo, Theresa S. Mayer
Proceedings Volume Alternative Lithographic Technologies VII, 94231U (2015) https://doi.org/10.1117/12.2087547
James Leibold, Ribal Georges Sabat
Proceedings Volume Alternative Lithographic Technologies VII, 94231V (2015) https://doi.org/10.1117/12.2076368
Sam Lowrey, Richard J. Blaikie
Proceedings Volume Alternative Lithographic Technologies VII, 94231W (2015) https://doi.org/10.1117/12.2175627
Posters: Directed Self-Assembly
K. Yamamoto, T. Nakano, M. Muramatsu, T. Tomita, K. Matsuzaki, T. Kitano
Proceedings Volume Alternative Lithographic Technologies VII, 94231X (2015) https://doi.org/10.1117/12.2085084
Andrew J. Peters, Richard A. Lawson, Benjamin D. Nation, Peter J. Ludovice, Clifford L. Henderson
Proceedings Volume Alternative Lithographic Technologies VII, 94231Y (2015) https://doi.org/10.1117/12.2085518
Corinne L. Carpenter, Kris T. Delaney, Nabil Laachi, Glenn H. Fredrickson
Proceedings Volume Alternative Lithographic Technologies VII, 94231Z (2015) https://doi.org/10.1117/12.2085639
Proceedings Volume Alternative Lithographic Technologies VII, 942320 (2015) https://doi.org/10.1117/12.2085676
C. Simão, D. Tuchapsky, W. Khunsin, A. Amann, M. A. Morris, C. M. Sotomayor Torres
Proceedings Volume Alternative Lithographic Technologies VII, 942322 (2015) https://doi.org/10.1117/12.2085748
A. Fouquet, L. Perraud, S. Bérard-Bergery, A. Gharbi, P. Pimenta-Barros, R. Tiron, J. Hazart, V. Farys
Proceedings Volume Alternative Lithographic Technologies VII, 942324 (2015) https://doi.org/10.1117/12.2085822
Matteo Lorenzoni, Laura Evangelio, Célia Nicolet, Christophe Navarro, Alvaro San Paulo, Francesc Perez Murano
Proceedings Volume Alternative Lithographic Technologies VII, 942325 (2015) https://doi.org/10.1117/12.2085829
Proceedings Volume Alternative Lithographic Technologies VII, 942326 (2015) https://doi.org/10.1117/12.2085830
Proceedings Volume Alternative Lithographic Technologies VII, 94232A (2015) https://doi.org/10.1117/12.2085985
Kenichi Izumi, Bongkeun Kim, Nabil Laachi, Kris T. Delaney, Michael Carilli, Glenn H. Fredrickson
Proceedings Volume Alternative Lithographic Technologies VII, 94232C (2015) https://doi.org/10.1117/12.2085685
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