Paper
20 September 1987 Current State Of The Art In InSb Infrared Staring Imaging Devices
A. Bahraman, C. H. Chen, J. M. Geneczko, M. H. Shelstad, R. N. Ting, J. G. Vodicka
Author Affiliations +
Proceedings Volume 0750, Infrared Systems and Components; (1987) https://doi.org/10.1117/12.939854
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States
Abstract
A monolithic 128 x 128 InSb array is described for staring infrared imaging systems operating in the 3-5μm spectral region. The array is fabricated with only 4 mask levels and has almost 5 times higher responsivity and nearly 14 times greater wafer yield as compared to a previous design. The higher responsivity has resulted in demonstration of significantly improved thermal imagery.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Bahraman, C. H. Chen, J. M. Geneczko, M. H. Shelstad, R. N. Ting, and J. G. Vodicka "Current State Of The Art In InSb Infrared Staring Imaging Devices", Proc. SPIE 0750, Infrared Systems and Components, (20 September 1987); https://doi.org/10.1117/12.939854
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Cited by 4 scholarly publications.
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KEYWORDS
Infrared imaging

Thermography

Staring arrays

Capacitance

Infrared radiation

Semiconducting wafers

Metals

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