Using MEMS mirrors to pattern electrical forces

Steven L. Neale; Hsan-Yin Hsu; Justin K. Valley; Arash Jamshidi; Ming C. Wu

doi:10.1117/12.828042

23 February 2009 Using MEMS mirrors to pattern electrical forces

Steven L. Neale, Hsan-Yin Hsu, Justin K. Valley, Arash Jamshidi, Ming C. Wu

Proceedings Volume 7209, MEMS Adaptive Optics III; 720909 (2009) https://doi.org/10.1117/12.828042
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

By switching between two tilt angles MEMS mirrors can be used to produce spatial light patterns. This enables the Digital Micromirror Display (DMD, Texas Instruments) chip to produce the images found in some data projectors. In this paper we will show how these images can be converted into electrical patterns. We use the electrical gradients in these patterns to control the movement of particles through dielectrophoresis. We show how this can be used to move cells within PBS solution and characterize our device. We also discuss possible ways to improve our optical setup through Adaptive Optics (AO).

Citation Download Citation

Steven L. Neale, Hsan-Yin Hsu, Justin K. Valley, Arash Jamshidi, and Ming C. Wu "Using MEMS mirrors to pattern electrical forces", Proc. SPIE 7209, MEMS Adaptive Optics III, 720909 (23 February 2009); https://doi.org/10.1117/12.828042

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