Object surface topography by means of a speckle correlation

Petr Smid; Pavel Horvath; Petra Wagnerova; Miroslav Hrabovsky

doi:10.1117/12.618634

13 June 2005 Object surface topography by means of a speckle correlation

Petr Smid, Pavel Horvath, Petra Wagnerova, Miroslav Hrabovsky

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.618634
Event: Optical Metrology, 2005, Munich, Germany

Abstract

In this paper we present an optical method based on speckle pattern correlation for measurement of the topography of a surface of an object under investigation. When this object is illuminated with coherent laser beam the arising speckle pattern bears information about the height profile of the object. The resolution of this method is influenced by geometrical parameters of optical measurement set-up. The designed experimental set-up for the measurement of the slope of the object with rough surface is described. Achieved results are presented in comparison with theoretic values.

Citation Download Citation

Petr Smid, Pavel Horvath, Petra Wagnerova, and Miroslav Hrabovsky "Object surface topography by means of a speckle correlation", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.618634

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