Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro

Vijay K. Varadan; K. A. Jose; Pascal B Xavier; D. Suh; Vasundara V. Varadan

doi:10.1117/12.388911

21 June 2000 Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro

Vijay K. Varadan, K. A. Jose, Pascal B Xavier, D. Suh, Vasundara V. Varadan

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388911
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

This paper presents the design, fabrication and evaluation of a conformal Radio Frequency (RF) MEMS Gyroscope, base don surface acoustic wave resonators (SAWR) and surface acoustic wave sensors (SAWS), with very high sensitivity and dynamic range. Most MEMS gyroscopes based on silicon vibratory sensors utilizes the energy transfer between the two vibratory modes suffers serious drawback in producing identical resonating modes and hence to attain a sub-degree per second is quite impractical. This 1 cm X 1 cm gyroscope is working based on the principles of surface acoustic wave (SAW) standing waves on a piezoelectric substrate. The SWAR creates standing wave inside the cavity and the particles at the anti-nodes of standing wave experience large amplitude of vibrations, which serves as the reference vibrating motion for this gyroscopes. Arrays of metallic dots are strategically positioned at the anti- node locations so that the effect of Coriolis force due to rotation will acoustically amplify the magnitude of the waves. The performance of this 74.2 MHz MEMS Gyroscope has been evaluated using geophone setup and rate table setup, which shows very high sensitivity and dynamic range, which is ideal for the conventional applications. Unlike other MEMS gyroscopes, this gyroscope has a planar configuration with no suspended resonating mechanical structures, thereby giving rise to inherent robustness and shock resistance. With its one layer planar configuration, this gyroscope can easily be implemented to the applications requiring conformal mounting on to a surface of interest.

Citation Download Citation

Vijay K. Varadan, K. A. Jose, Pascal B Xavier, D. Suh, and Vasundara V. Varadan "Conformal MEMS-IDT gyroscopes and their comparison with fiber optic gyro", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388911

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available