Experimental study of the optical properties of LTCVD SiO2

Herzl Aharoni; Pieter L. Swart

doi:10.1117/12.49055

1 April 1991 Experimental study of the optical properties of LTCVD SiO2

Herzl Aharoni, Pieter L. Swart

Proceedings Volume 1442, 7th Mtg in Israel on Optical Engineering; (1991) https://doi.org/10.1117/12.49055
Event: 7th Meeting of Optical Engineering in Israel, 1990, Tel-Aviv, Israel

Abstract

Experimental results are presented on the optical and infrared properties of Si02, deposited on Si by means of low temperature thermal decomposition of silane with a mixture of oxygen, in a flowing nitrogen atmosphere. The experimental conditions during the deposition were chosen such that the decomposition of silane was sufficiently low for the growth of uniform and dense layers. Good control on thickness in the range 50 to 230 nm was obtained by selecting proper growth temperature and nitrogen carrier gas flow rate. It was found, experimentally, that the refractive index varies as a function of the Si02 thickness up to a certain point and only then attains its constant value. The Infrared absorption spectrum of the above films was studied in the range of 200 cm1 to 4000 cm1. The position and widths ofthe absorption bands at nominally 1070, 810 cm1 d 465 nm, and the changes in these as a function of thickness were used to shed light on the behaviour of the refractive index. It was also established that the absorption bands obey the Lambert-Bouguer law.

Citation Download Citation

Herzl Aharoni and Pieter L. Swart "Experimental study of the optical properties of LTCVD SiO2", Proc. SPIE 1442, 7th Mtg in Israel on Optical Engineering, (1 April 1991); https://doi.org/10.1117/12.49055

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Silicon

Refractive index

Reflectivity

Absorption

Infrared radiation

Optical engineering

Transmittance

Show All Keywords

Keywords/Phrases

Search In:

Publication Years