Design and verification of flexible belt grinding system for SiC mirror

Hui Gong; Zhigang Zhang; Minlong Lian; Yifan Zhang; Dongjin Cao

doi:10.1117/12.2622694

27 March 2022 Design and verification of flexible belt grinding system for SiC mirror

Hui Gong, Zhigang Zhang, Minlong Lian, Yifan Zhang, Dongjin Cao

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121692B (2022) https://doi.org/10.1117/12.2622694
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Because of the high specific stiffness, the excellent thermal conductivity and thermal stability, silicon carbide (SiC) material is widely used as the material of optical reflecting mirror. The hardness of SiC is 22.2±2.2 GPa. It is difficult to be machined. A new robot flexible-belt grinding system was developed. It consists of a robot grinding system, a stress monitoring system and a clamping platform. The robot has a 6-axis manipulator. The robotic arm maximum travel range is more than 3m. Several grinding experiments were carried out, and the optimum grinding parameters for SiC were obtained. The line speed of flexible-belt is 10m/s, the feeding speed of the robot is 5mm/s. A Φ1.55m SiC mirror was grinded, and the entire processing cycle is 40 days. The processing efficiency is increased by 90%. After the polishing and coating process, the mirror surface was measured by a interferometer. The surface root mean square(RMS) is 0.0157 λ(λ=632.8nm).

Citation Download Citation

Hui Gong, Zhigang Zhang, Minlong Lian, Yifan Zhang, and Dongjin Cao "Design and verification of flexible belt grinding system for SiC mirror", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121692B (27 March 2022); https://doi.org/10.1117/12.2622694

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